917 58 274
- Enhet:
- SINTEF Digital
- Avdeling:
- Smarte sensorer og mikrosystemer
- Kontorsted:
- Oslo
Publikasjoner
- On the effect of water-induced degradation of thin-film piezoelectric microelectromechanical systems
- Electrochemically driven degradation of chemical solution deposited ferroelectric thin-films in humid ambient
- Dynamical Behaviour of a piezoMEMS Micromirror During Degradation
- Degradation of PZT in humid ambient – an electrochemically controlled process
- PiezoMEMS reliability: why the electrode-material matters in humid ambient
- Growth of epitaxial PZT and PMN-PT for IDT electrodes on full wafer area by PLD for fabrication of energy harvesters
- Performance and reliability of PZT-based piezoelectric micromirrors operated in realistic environments
- On the dynamics of a degrading piezoelectric micromirror operated in harsh environments
- Breakdown mechanisms and passivation of piezoelectric micro-mirrors
- Performance and reliability of PZT-based piezoelectric micromirrors operated in realistic environments