The number of application areas for piezoelectric micro electromechanical systems based on PZT have increased rapidly over the years. Thus, to continue the development towards commercial deployment, characterizing lifetime and reliability during operation in realistic and harsh environments is...

Lead Zirconate Titanate (Pb(Zrx,Ti1−x )O3) is, due to its high piezoresponse, widely used in piezoelectric Micro Electro Mechanical Systems (piezoMEMS) such as accelerometers, gyroscopes and actuators. However, since PZT is highly sensitive to humidity, devices tend to suffer severe degradation when...

SINTEF is an independent research institute that has experience with making piezoMEMS devices since 2002. Our competences cover the whole process from idea and design, through materials development and process integration to device fabrication to packaging. SINTEF develops piezoMEMS in-house and in...