Publikasjoner og ansvarsområder
Towards high-throughput large-area metalens fabrication using UV-nanoimprint lithography and Bosch deep reactive ion etching
Dynamical Behaviour of a piezoMEMS Micromirror During Degradation
Nanoimprint for diffractive optics and photonic crystals
High-frequency 2D PZT based micromirrors
On the dynamics of a degrading piezoelectric micromirror operated in harsh environments
Breakdown mechanisms and passivation of piezoelectric micro-mirrors
Lead Zirconate Titanate (Pb(Zrx,Ti1−x )O3) is, due to its high piezoresponse, widely used in piezoelectric Micro Electro Mechanical Systems (piezoMEMS) such as accelerometers, gyroscopes and actuators. However, since PZT is highly sensitive to humidity, devices tend to suffer severe degradation when...
2D PZT based micromirrors with high resonance frequency or high angular deflection
Miniature, low-cost, 200 mW, infrared thermal emitter sealed by wafer-level bonding
Infrared (IR) thermal emitters are widely used in monitoring applications. For autonomous systems, miniaturized devices with low power consumption are needed. We have designed, fabricated and tested a novel device design, packaged on the wafer level by Al-Al thermo-compression bonding. 80 μm wide...