Publikasjoner og ansvarsområder
Electrochemically driven degradation of chemical solution deposited ferroelectric thin-films in humid ambient
Dynamical Behaviour of a piezoMEMS Micromirror During Degradation
Degradation of PZT in humid ambient – an electrochemically controlled process
PiezoMEMS reliability: why the electrode-material matters in humid ambient
Growth of epitaxial PZT and PMN-PT for IDT electrodes on full wafer area by PLD for fabrication of energy harvesters
Performance and reliability of PZT-based piezoelectric micromirrors operated in realistic environments
The number of application areas for piezoelectric micro electromechanical systems based on PZT have increased rapidly over the years. Thus, to continue the development towards commercial deployment, characterizing lifetime and reliability during operation in realistic and harsh environments is...
On the dynamics of a degrading piezoelectric micromirror operated in harsh environments
Breakdown mechanisms and passivation of piezoelectric micro-mirrors
Lead Zirconate Titanate (Pb(Zrx,Ti1−x )O3) is, due to its high piezoresponse, widely used in piezoelectric Micro Electro Mechanical Systems (piezoMEMS) such as accelerometers, gyroscopes and actuators. However, since PZT is highly sensitive to humidity, devices tend to suffer severe degradation when...