Publikasjoner og ansvarsområder
High-frequency 2D PZT based micromirrors
Breakdown mechanisms and passivation of piezoelectric micro-mirrors
Lead Zirconate Titanate (Pb(Zrx,Ti1−x )O3) is, due to its high piezoresponse, widely used in piezoelectric Micro Electro Mechanical Systems (piezoMEMS) such as accelerometers, gyroscopes and actuators. However, since PZT is highly sensitive to humidity, devices tend to suffer severe degradation when...
2D PZT based micromirrors with high resonance frequency or high angular deflection
On the dynamics of a degrading piezoelectric micromirror operated in harsh environments
Bimorphly actuated piezoelectric thin films offer an efficient low-power route for generating microelectromechanical motion compared to e.g. electrostatic or thermo-mechanical actuation principles . This is since a large effective in-plane stress can be generated by applying relatively low voltag...
Miniature, low-cost, 200 mW, infrared thermal emitter sealed by wafer-level bonding
Infrared (IR) thermal emitters are widely used in monitoring applications. For autonomous systems, miniaturized devices with low power consumption are needed. We have designed, fabricated and tested a novel device design, packaged on the wafer level by Al-Al thermo-compression bonding. 80 μm wide Al...
Design and Simulation of Efficient Narrowband Thermal Emitter with 3 µm wavelength
A low-power infrared source based on a silicon photonic-crystal membrane has been designed. Temperature distribution and reflection spectrum has been simulated. Large narrowband IR absorption is obtained with optimal material doping....
Design and simulation of efficient narrowband thermal emitter with 3 μm wavelength
A low-power infrared source based on a silicon photonic-crystal membrane has been designed. Temperature distribution and reflection spectrum has been simulated. Large narrowband IR absorption is obtained with optimal material doping...