
975 80 163
- Enhet:
- SINTEF Digital
- Avdeling:
- Smarte sensorer og mikrosystemer
- Kontorsted:
- Oslo
Publikasjoner
- Technological aspects of devices for efficient ion concentration polarization and electro-driven separation with ultra-shallow nanochannels
- A Novel Method for Depositing Patterned BCB using Spotter for Low Temperature Wafer Level Bonding
- Through Silicon Vias in MEMS packaging, a review
- Metal Films for MEMS Pressure Sensors: Comparison of Al, Ti, Al-Ti Alloy and Al/Ti Film Stacks
- Metal films for MEMS pressure sensors: comparison of Al, Ti, Al-Ti alloy and Al/Ti film stacks
- Vertical Interconnects for High-End MEMS
- Al-Al Wafer-Level Thermocompression Bonding applied for MEMS
- Al-Al Wafer-Level Thermocompression Bonding applied for MEMS
- Plastic Deformation of Thin Si Membranes in Si-Si Direct Bonding
- Plastic Deformation of Thin Si Membranes in Si-Si Direct Bonding