Sigurd T. Moe

Publikasjoner

• 2020 Poster
  Technological aspects of devices for efficient ion concentration polarization and electro-driven separation with ultra-shallow nanochannels
• 2019 Poster
  A Novel Method for Depositing Patterned BCB using Spotter for Low Temperature Wafer Level Bonding
• 2019 Vitenskapelig foredrag
  Through Silicon Vias in MEMS packaging, a review
• 2018 Vitenskapelig Kapittel/Artikkel/Konferanseartikkel
  Metal Films for MEMS Pressure Sensors: Comparison of Al, Ti, Al-Ti Alloy and Al/Ti Film Stacks
• 2018 Vitenskapelig foredrag
  Metal films for MEMS pressure sensors: comparison of Al, Ti, Al-Ti alloy and Al/Ti film stacks
• 2018 Vitenskapelig Kapittel/Artikkel/Konferanseartikkel
  Vertical Interconnects for High-End MEMS
• 2017 Vitenskapelig Kapittel/Artikkel/Konferanseartikkel
  Al-Al Wafer-Level Thermocompression Bonding applied for MEMS
• 2017 Vitenskapelig foredrag
  Al-Al Wafer-Level Thermocompression Bonding applied for MEMS
• 2016 Vitenskapelig artikkel
  Plastic Deformation of Thin Si Membranes in Si-Si Direct Bonding
• 2016 Vitenskapelig foredrag
  Plastic Deformation of Thin Si Membranes in Si-Si Direct Bonding