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Metal Films for MEMS Pressure Sensors: Comparison of Al, Ti, Al-Ti Alloy and Al/Ti Film Stacks

Category

Academic chapter/article/Conference paper

Client

  • Research Council of Norway (RCN) / 247781

Language

English

Author(s)

Affiliation

  • SINTEF Digital / Microsystems and Nanotechnology
  • Fraunhofer Institute for Mechanics of Materials IWM

Year

2018

Publisher

IEEE

Book

2018 7th Electronic System-Integration Technology Conference (ESTC), Dresden, Germany, 18-21 Sept. 2018

ISBN

978-1-5386-6814-6

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