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Metal Films for MEMS Pressure Sensors: Comparison of Al, Ti, Al-Ti Alloy and Al/Ti Film Stacks

Metal Films for MEMS Pressure Sensors: Comparison of Al, Ti, Al-Ti Alloy and Al/Ti Film Stacks

Category
Academic chapter/article/Conference paper
Client
  • Research Council of Norway (RCN) / 247781
Language
English
Author(s)
Affiliation
  • SINTEF Digital / Microsystems and Nanotechnology
  • Fraunhofer Institute for Mechanics of Materials IWM
Year
Publisher
IEEE
Book
2018 7th Electronic System-Integration Technology Conference (ESTC), Dresden, Germany, 18-21 Sept. 2018
ISBN
978-1-5386-6814-6