Worked at SINTEF MiNaLab since 2001, with a wide range of MEMS processes. From 2008 group leader (later with title Research Manager) for the Si Production group. This was merged to the Cleanroom Technology group and includes process engineers and service engineers. Since 2013 title as Production Manager, organising all processing in the cleanroom.
Expert on thin film metal (sputtering) and wafer bonding, and good overview of all MiNaLabs processes.
Siv.ing from the Physics Dept at NTNU, 1994
Competence and research areas
MEMS, sputtering, wafer bonding, metal thin film, semiconductor processing