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Bond strength of conductive Si-Si fusion bonded seals

Category

Academic lecture

Client

  • Research Council of Norway (RCN) / 210601

Language

English

Author(s)

  • Kari Schjølberg-Henriksen
  • Lars Geir Whist Tvedt
  • Stein Are Gjelstad
  • Christopher Mørk
  • Sigurd T. Moe
  • Kristin Imenes
  • Erik Poppe
  • Dag Thorstein Wang

Affiliation

  • SINTEF Digital / Smart Sensors and Microsystems
  • University of South-Eastern Norway

Presented at

DTIP

Place

Cannes

Date

01.04.2014 - 04.04.2014

Organizer

CMP

Year

2014

View this publication at Cristin