Bond strength of conductive Si-Si fusion bonded seals
Category
Academic lecture
Client
- Research Council of Norway (RCN) / 210601
Language
English
Author(s)
- Kari Schjølberg-Henriksen
- Lars Geir Whist Tvedt
- Stein Are Gjelstad
- Christopher Mørk
- Sigurd Moe
- Kristin Imenes
- Erik Poppe
- Dag Thorstein Wang
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- University of South-Eastern Norway
Presented at
DTIP
Place
Cannes
Date
01.04.2014 - 04.04.2014
Organizer
CMP