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Metal films for MEMS pressure sensors: comparison of Al, Ti, Al-Ti alloy and Al/Ti film stacks

Category

Academic lecture

Client

  • Research Council of Norway (RCN) / 247781

Language

English

Author(s)

Affiliation

  • SINTEF Digital / Microsystems and Nanotechnology
  • Norwegian University of Science and Technology
  • University of Oslo
  • Unknown

Presented at

7th Electronics System-Integration Technology Conference

Place

Dresden

Date

18.09.2018 - 21.09.2018

Organizer

IEEE Electronic Packaging Society

Year

2018

External resources

View this publication at Cristin