To main content

Metal films for MEMS pressure sensors: comparison of Al, Ti, Al-Ti alloy and Al/Ti film stacks

Metal films for MEMS pressure sensors: comparison of Al, Ti, Al-Ti alloy and Al/Ti film stacks

Category
Academic lecture
Client
  • Research Council of Norway (RCN) / 247781
Language
English
Author(s)
Affiliation
  • SINTEF Digital / Microsystems and Nanotechnology
  • Norwegian University of Science and Technology
  • University of Oslo
  • Unknown
Presented at
7th Electronics System-Integration Technology Conference
Place
Dresden
Date
18.09.2018 - 21.09.2018
Organizer
IEEE Electronic Packaging Society
Year
External resources