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Plastic Deformation of Thin Si Membranes in Si-Si Direct Bonding

Plastic Deformation of Thin Si Membranes in Si-Si Direct Bonding

Category
Academic lecture
Language
English
Author(s)
Affiliation
  • SINTEF Digital / Microsystems and Nanotechnology
Presented at
PRiME 2016
Place
Honolulu, Hawaii
Date
02.10.2016 - 07.10.2016
Organizer
Electrochemical Society
Year