Plastic Deformation of Thin Si Membranes in Si-Si Direct Bonding
Category
Academic lecture
Language
English
Author(s)
- Erik Poppe
- Geir Uri Jensen
- Sigurd Moe
- Dag Thorstein Wang
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
Presented at
PRiME 2016
Place
Honolulu, Hawaii
Date
02.10.2016 - 07.10.2016
Organizer
Electrochemical Society