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Fabrication of an array of silicon microscales for the monitoring of chemical processes

Sammendrag

We present the fabrication and demonstration of a two-dimensional array of scales micromachined in silicon. Each scale consists of a platform suspended by a spring. The mass present on the platform of each scale is measured from a distance by a camera, which is imaging the fringe pattern that arises from optical interference in an air gap under each scale. A diffractive lens at the bottom of the gap separates the fringe signal from unwanted reflections and directs the fringe signal towards the camera. When a mass deflects a scale platform downwards, the gap narrows at the scale centre and the fringe pattern gets tighter. Operation at temperatures as high as 700 °C was demonstrated, which makes the presented device useful for the monitoring of high-temperature chemical processes.
Les publikasjonen

Kategori

Vitenskapelig artikkel

Språk

Engelsk

Forfatter(e)

  • Matthieu Jean P Lacolle
  • Ib-Rune Johansen
  • Dag Thorstein Wang
  • Sigurd Moe
  • Håkon Sagberg
  • Sigmund Clausen
  • Arne Karlsson
  • Duncan Akporiaye

Institusjon(er)

  • SINTEF Digital / Smart Sensors and Microsystems
  • Diverse norske bedrifter og organisasjoner
  • SINTEF Industri / Prosessteknologi

År

2012

Publisert i

Journal of Micromechanics and Microengineering (JMM)

ISSN

0960-1317

Forlag

IOP Publishing

Årgang

22

Hefte nr.

7

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