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Resist evaluation for fabrication of diffractive optical elements (DOEs) with sub-micron resolution in a MEMS production line

Resist evaluation for fabrication of diffractive optical elements (DOEs) with sub-micron resolution in a MEMS production line

Kategori
Vitenskapelig artikkel
Språk
Engelsk
Forfatter(e)
Institusjon(er)
  • SINTEF Digital / Microsystems and Nanotechnology
  • Universitetet i Oslo
  • SINTEF Digital / Smart Sensor Systems
År
Publisert i
Journal of Micromechanics and Microengineering
ISSN
0960-1317
Forlag
Institute of Physics Publishing (IOP)
Årgang
19
Hefte nr.
12