Publikasjoner
- Biocompatible bonding of a rigid off-stoichiometry thiol-ene-epoxy polymer microfluidic cartridge to a biofunctionalized silicon biosensor Les publikasjonen
- Design and Simulation of Efficient Narrowband Thermal Emitter with 3 µm wavelength
- Highly sensitive MEMS microphone with optical readout
- Highly sensitive MEMS microphone with optical readout
- Resist evaluation for fabrication of diffractive optical elements (DOEs) with sub-micron resolution in a MEMS production line