Til hovedinnhold

Growth of epitaxial PZT and PMN-PT for IDT electrodes on full wafer area by PLD for fabrication of energy harvesters

Growth of epitaxial PZT and PMN-PT for IDT electrodes on full wafer area by PLD for fabrication of energy harvesters

Kategori
Vitenskapelig foredrag
Oppdragsgiver
  • Research Council of Norway (RCN) / 241887/O70
Språk
Engelsk
Forfatter(e)
Institusjon(er)
  • SINTEF Digital / Microsystems and Nanotechnology
  • Ukjent
Presentert på
2018 PiezoMEMS Workshop
Sted
Orlando
Dato
15.01.2018 - 16.01.2018
Arrangør
Oregon State University and US Army Research Laboratory
År
Eksterne ressurser