
- Enhet:
- SINTEF Digital
- Avdeling:
- Smarte sensorer og mikrosystemer
- Kontorsted:
- Oslo
Publikasjoner
- On the effect of water-induced degradation of thin-film piezoelectric microelectromechanical systems
- Growth of epitaxial PZT and PMN-PT for IDT electrodes on full wafer area by PLD for fabrication of energy harvesters
- High-frequency 2D PZT based micromirrors
- Wafer level integration of epitaxial piezoelectric thin films for novel NEMS, MEMS and MOEMS applications