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Simultaneous improvement of surface finish and bonding of centrifugal microfluidic devices in cyclo-olefin polymers

Sammendrag

Two key issues in the manufacturing of microfluidic devices are to obtain low surface roughness, i.e. in the range of nanometers (to facilitate optical detection and controlled flow through microfluidic networks), and to achieve robust bonding. Here we report that a chemical polishing step, used for smoothening the surface of cyclo-olefin polymer (COP) components manufactured by micromilling, reduces the surface roughness (to Ra ~ 150 nm) and facilitates a leak-tight COP-COP bond. We report new results on COP structuring and surface characterization by white light interferometry (WLI), infrared spectroscopy (FTIR-ATR), contact angle measurements and transmittance measurements, as well as demonstrations of a functional thermally bonded centrifugal microfluidic devices.

Kategori

Poster

Oppdragsgiver

  • EC/H2020 / 688448
  • Research Council of Norway (RCN) / 245685

Språk

Engelsk

Institusjon(er)

  • SINTEF Digital / Smart Sensors and Microsystems
  • Ukjent
  • Universitetet i Sørøst-Norge
  • SINTEF Industri / Materialer og nanoteknologi
  • SINTEF Industri / Bærekraftig energiteknologi
  • SINTEF Industri / Prosessteknologi

Presentert på

The 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018

Sted

Belfast

Dato

21.01.2018 - 25.01.2018

Arrangør

IEEE

År

2018

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