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Qualification and applications of a piezoelectric MEMS process

Sammendrag

An industrializable process for manufacturing of piezoelectric ultrasound transducer elements is demonstrated. The PZT film is deposited by chemical solution deposition on SOI wafers, and standard MEMS processes are utilized to make cantilevers, bridges and membranes. The PZT film of ~50% of the devices exposed to thermal aging were found to fail at 85°C – 85%RH (relative humidity), while a real-life test of 8·1010 cycles at resonance only gives a slight change in Q-value and resonance frequency.

Kategori

Vitenskapelig Kapittel/Artikkel/Konferanseartikkel

Språk

Engelsk

Forfatter(e)

Institusjon(er)

  • SINTEF Digital / Microsystems and Nanotechnology
  • SINTEF Industri / Materialer og nanoteknologi

År

2007

Forlag

IEEE

Bok

International Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007, Lyon 10-14 June, 2007

ISBN

1424408423

Side(r)

529 - 532

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