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Heterogeneous integration of silicon fluidic components in polymer chips

Heterogeneous integration of silicon fluidic components in polymer chips

Kategori
Vitenskapelig Kapittel/Artikkel/Konferanseartikkel
Sammendrag
We present a new heterogeneous integration technology which enables direct incorporation of silicon-based microfluidic components in an injection-moulded polymer lab-on-a-chip (LOC). The integration is performed as part of the injection moulding process, forming direct fluidic connections between the polymer and the silicon chip while embedding the silicon chip in the polymer matrix. The resulting fluidic interface between the silicon and the polymer chip is therefore highly compact and free of dead-volume. The method requires no secondary integration process such as welding or gluing. The method opens for mass fabrication of highly functional, heterogeneous LOC systems.
Språk
Engelsk
Forfatter(e)
Institusjon(er)
  • SINTEF Digital / Microsystems and Nanotechnology
  • SINTEF Industri / Materialer og nanoteknologi
År
Forlag
Chemical and Biological Microsystems Society
Bok
17th international conference on miniaturized systems for chemistry and life sciences, 2013, Freiburg, Germany, 27-31 Oct, 2013
Hefte nr.
2013
ISBN
978-0-9798064-6-9
Side(r)
796 - 798