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Heterogeneous integration of silicon fluidic components in polymer chips

Sammendrag

We present a new heterogeneous integration technology which enables direct incorporation of silicon-based microfluidic components in an injection-moulded polymer lab-on-a-chip (LOC). The integration is performed as part of the injection moulding process, forming direct fluidic connections between the polymer and the silicon chip while embedding the silicon chip in the polymer matrix. The resulting fluidic interface between the silicon and the polymer chip is therefore highly compact and free of dead-volume. The method requires no secondary integration process such as welding or gluing. The method opens for mass fabrication of highly functional, heterogeneous LOC systems.

Kategori

Vitenskapelig Kapittel/Artikkel/Konferanseartikkel

Språk

Engelsk

Forfatter(e)

Institusjon(er)

  • SINTEF Digital / Smart Sensors and Microsystems
  • SINTEF Industri / Materialer og nanoteknologi

År

2013

Forlag

Chemical and Biological Microsystems Society

Bok

17th international conference on miniaturized systems for chemistry and life sciences, 2013, Freiburg, Germany, 27-31 Oct, 2013

Hefte nr.

2013

ISBN

978-0-9798064-6-9

Side(r)

796 - 798

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