Edgeless silicon sensors fabricated without support wafer
Kategori
Vitenskapelig artikkel
Språk
Engelsk
Forfatter(e)
- Ozhan Koybasi
- Jiaguo Zhang
- Angela Kok
- Anand Summanwar
- Marco Povoli
- Lars Breivik
- Anna Bergamaschi
- Bernd Schmitt
Institusjon(er)
- SINTEF Digital / Smart Sensors and Microsystems
- Paul Scherrer Institut
År
2019Publisert i
Nuclear Instruments and Methods in Physics Research Section A : Accelerators, Spectrometers, Detectors and Associated Equipment
ISSN
0168-9002
Årgang
953