Til hovedinnhold

Assessment of feature engineering and long short-term memory for structure loss identification from process data in monocrystalline silicon growth by the Czochralski method

Assessment of feature engineering and long short-term memory for structure loss identification from process data in monocrystalline silicon growth by the Czochralski method

Kategori
Rapport
Oppdragsgiver
  • Research Council of Norway (RCN) / 257639
Språk
Engelsk
Forfatter(e)
Institusjon(er)
  • Norges teknisk-naturvitenskapelige universitet
  • SINTEF Industri / Metallproduksjon og prosessering
År
2019
Forlag
Department of Materials Science and Engineering, NTNU