Assessment of feature engineering and long short-term memory for structure loss identification from process data in monocrystalline silicon growth by the Czochralski method
Assessment of feature engineering and long short-term memory for structure loss identification from process data in monocrystalline silicon growth by the Czochralski method
Kategori
Rapport
Oppdragsgiver
- Research Council of Norway (RCN) / 257639
Språk
Engelsk
Institusjon(er)
- Norges teknisk-naturvitenskapelige universitet
- SINTEF Industri / Metallproduksjon og prosessering
År
2019
Forlag
Department of Materials Science and Engineering, NTNU
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