Next generation test equipment for micro-production
Kategori
Vitenskapelig artikkel
Språk
Engelsk
Forfatter(e)
- Kay Gastinger
- Lars Johnsen
- Malgorzata Kujawinska
- Michal Jozwik
- Uwe Zeitner
- Peter Dannberg
- Jorge Albero
- Sylwester Bargiel
- Christoph Schaeffel
- Stephan Beer
- Rudolf Moosburger
- Patrick Lamberlet
- Marco Pizzi
Institusjon(er)
- SINTEF Digital
- SINTEF Digital / Smart Sensors and Microsystems
- Politechnika Warszawska
- Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Centre national de la recherche scientifique
- Tyskland
- Centre Suisse d'Electronique et de Microtechnique SA
- Sveits
- Italia
År
2010Publisert i
Proceedings of SPIE, the International Society for Optical Engineering
ISSN
0277-786X
Forlag
SPIE - The International Society for Optics and Photonics
Årgang
7718