3D Integration of MEMS and IC: Design, Technology and Simulations
Kategori
Vitenskapelig Kapittel/Artikkel/Konferanseartikkel
Språk
Engelsk
Forfatter(e)
- Maaike Margrete Visser Taklo
- Kari Schjølberg-Henriksen
- Nicolas Lietaer
- Josef Prainsack
- Anders Elfving
- Josef Weber
- Matthias Klein
- Peter Schneider
- Sven Reitz
Institusjon(er)
- SINTEF Digital / Smart Sensors and Microsystems
- Tyskland
- SensoNor ASA
År
2010Forlag
Springer
Bok
Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators (NATO Science for Peace and Security Series B: Physics and Biophysics)
ISBN
904813806X
Side(r)
191 - 203