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Fabrication and characterization of a wideband MEMS energy harvester utilizing nonlinear springs

Sammendrag

This paper presents the fabrication, characterization and modeling of a wideband MEMS electrostatic energy harvester utilizing nonlinear springs. The experimental results show that the vibration energy harvester displays a strong softening spring effect. For narrow band vibration, the energy harvester exhibits a widening bandwidth during frequency down-sweeps. For increasing levels of broadband random noise vibration, the energy harvester displays a broadening bandwidth response. Furthermore, the vibration energy harvester with softening springs not only increases the bandwidth, but also harvests more output power than a linear energy harvester at a sufficient level of broadband random vibration. At a broadband random vibration of 7.0 × 10-4 g² Hz-1 we found that the bandwidth increases by more than 13 times and the average harvesting output power increases by 68% compared to that of a linear vibration energy harvester. Numerical analysis confirmed that the softening springs are responsible for the band broadening.

Kategori

Vitenskapelig artikkel

Språk

Engelsk

Forfatter(e)

  • Duy Son Nguyen
  • Einar Halvorsen
  • Geir Uri Jensen
  • Andreas Vogl

Institusjon(er)

  • Universitetet i Sørøst-Norge
  • SINTEF Digital
  • SINTEF Digital / Microsystems and Nanotechnology

År

2010

Publisert i

Journal of Micromechanics and Microengineering (JMM)

ISSN

0960-1317

Forlag

IOP Publishing

Årgang

20

Hefte nr.

12

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