Sammendrag
We report on the characterization of 3D diodes with trenched electrodes and active edges manufactured by SINTEF MiNaLab (Oslo, Norway), and irradiated with reactor neutrons up to a maximum fluence of 2 × 1016 neq cm−2. The charge collection performance of these test structures is investigated by using a position resolved pulsed laser system, and discussed with the aid of TCAD simulations. In spite of the non-idealities of the test setup, whose spatial resolution is not fine enough for the small-pitch geometries of the considered samples, results confirm the good radiation hardness of 3D sensors with trenched electrodes.