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Status of 3D detector development at SINTEF for ITk Upgrade

Sammendrag

SINTEF in collaboration with University of Oslo have been performing R&D activities on 3D detectors with the aim to qualify to be a production site for ITk upgrade. In this context, a 3D detector
fabrication run has been completed recently with very promising results. Various sensor geometries
with active edges were implemented, and the fabrication was carried out on 6-inch Si-Si wafers with
sensor substrate thicknesses of 100 µm and 50 µm using single-sided processing approach. We will
present the electrical test results; assembly, irradiation and test beam plans; and the plans for the
next fabrication run

Kategori

Vitenskapelig foredrag

Språk

Engelsk

Forfatter(e)

Institusjon(er)

  • SINTEF Digital / Microsystems and Nanotechnology
  • Universitetet i Oslo
  • Universitetet i Bergen

Presentert på

13th "Trento" Workshop on advanced silicon radiation detectors (TREDI 2018)

Sted

Munich

Dato

19.02.2018 - 21.02.2018

År

2018

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