Sammendrag
A highly planar, robust 2D mirror with piezoelectric actuation is presented. The mirror can be operated in a wide frequency range including static deflection. It is ideally suited for target tracking and free-space optical communication
A robust, non-resonant piezoelectric micromirror
Kategori
Vitenskapelig foredrag
Språk
Engelsk
Forfatter(e)
- Thor Bakke
- Ib-Rune Johansen
Institusjon(er)
- SINTEF Digital / Smart Sensors and Microsystems
Presentert på
2011 International Conference on Optical MEMS & Nanophotonics
Sted
Istanbul, Tyrkia
Dato
08.08.2011 - 11.08.2011
Arrangør
IEEE