Til hovedinnhold

Smart Inspection System for High Speed and Multifunctional Testing of MEMS and MOEMS

Smart Inspection System for High Speed and Multifunctional Testing of MEMS and MOEMS

Kategori
Vitenskapelig foredrag
Sammendrag
SMARTIEHS develops a major breakthrough in M(O)EMS testing innovative test concept parallel inspection of 100 M(O)EMS structures on the wafer level high-speed inspection measurement time can be reduced by a factor of 100 multi-functional approach exchangeable probing wafer enable a wide range of test parameters in the same instrument
Språk
Engelsk
Forfatter(e)
Institusjon(er)
  • SINTEF Digital / Smart Sensor Systems
  • SINTEF Digital
Presentert på
MEMSWAVE 2008 RF-MST Workshop
Sted
Heraklion, Kreta
Dato
30.06.2008 - 30.06.2008
Arrangør
European Commision
År