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Mirrors and anti-reflective surfaces in single crystal silicon by patterning of the silicon surface

Mirrors and anti-reflective surfaces in single crystal silicon by patterning of the silicon surface

Kategori
Vitenskapelig Kapittel/Artikkel/Konferanseartikkel
Sammendrag
We present mirrors and anti-reflective (AR) surfaces based on micro-structuring of silicon. Compared to dielectric Bragg reflector mirrors and thin film AR-coatings these structures are thinner, result in less material stress, and are compatible with CMOS technology (all silicon). Our surface structures are optimized for the 7-14 μm wavelength range. Such structures have applications within fields of infrared imaging, alcoholmeters, and cooling and anesthesia gas-detectors.
Språk
Engelsk
Forfatter(e)
  • Sanja Hadzialic
  • Maaike Margrete Visser Taklo
Institusjon(er)
  • SINTEF Digital / Microsystems and Nanotechnology
  • SINTEF Digital / Smart Sensor Systems
År
Forlag
IEEE conference proceedings
Bok
2013 International Conference on Optical MEMS and Nanophotonics (OMN), Kanazawa, 18-22 Aug. 2013
ISBN
978-1-4799-1512-5
Side(r)
65 - 66