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PZT micromirror with integrated piezoresistive position sensors

PZT micromirror with integrated piezoresistive position sensors

Kategori
Vitenskapelig Kapittel/Artikkel/Konferanseartikkel
Sammendrag
PZT is an ideal material for high force micromechanical actuators. However, the inherent hysteresis prevents accurate positioning. By integrating piezoresistive sensors it has been shown that the actuation of a piston-type micromirror can be improved.
Språk
Engelsk
Forfatter(e)
  • Thor Bakke
  • Ib-Rune Johansen
Institusjon(er)
  • SINTEF Digital / Microsystems and Nanotechnology
År
Forlag
IEEE conference proceedings
Bok
2012 International Conference on Optical MEMS and Nanophotonics (OMN), Banff, AB, 6-9 Aug. 2012
ISBN
978-1-4577-1511-2
Side(r)
192 - 193