Publikasjon
Statistical analysis of structure loss in Czochralski silicon growth
https://www.sintef.no/publikasjoner/publikasjon/?pubid=1749970
The loss of the dislocation-free growth (structure loss) during Czochralski (Cz) silicon pulling can have a strong negative impact on the production yield of the Cz photovoltaic industry. As almost no publication has been dedicated to this phenomenon in the past, this paper aims at investigate in...
Four industrial-scale n-type Czochralski silicon crystals were grown with different impurity contents, i.e. metallics, phosphorus and oxygen. Horizontal slices were obtained from the top and middle of the crystals and were characterized in terms of lifetime and both defect and impurity distribution...