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Edgeless sensors fabricated without support wafer

Edgeless sensors fabricated without support wafer

Kategori
Vitenskapelig artikkel
Språk
Engelsk
Forfatter(e)
Institusjon(er)
  • SINTEF Digital / Microsystems and Nanotechnology
  • Paul Scherrer Institut
År
2019
Publisert i
Nuclear Instruments and Methods in Physics Research Section A : Accelerators, Spectrometers, Detectors and Associated Equipment
ISSN
0168-9002