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Breakdown mechanisms and passivation of piezoelectric micro-mirrors

Breakdown mechanisms and passivation of piezoelectric micro-mirrors

Kategori
Vitenskapelig foredrag
Sammendrag
Lead Zirconate Titanate (Pb(Zrx,Ti1−x )O3) is, due to its high piezoresponse, widely used in piezoelectric Micro Electro Mechanical Systems (piezoMEMS) such as accelerometers, gyroscopes and actuators. However, since PZT is highly sensitive to humidity, devices tend to suffer severe degradation when operated under realistic or harsh conditions. The humidity-related breakdown mechanisms are many and complex, making the need for passivation critical in order to ensure reliable and long-lived piezoMEMS-devices.
Oppdragsgiver
  • Research Council of Norway (RCN) / 247781
Språk
Engelsk
Forfatter(e)
Institusjon(er)
  • Norges teknisk-naturvitenskapelige universitet
  • SINTEF Digital / Microsystems and Nanotechnology
  • SINTEF Digital / Smart Sensor Systems
  • Ukjent
Presentert på
NanoNetwork 2017
Sted
Bergen
Dato
12.06.2018 - 14.06.2018
Arrangør
Norwegian University of Science and Technology (NTNU)
År
2018