Til hovedinnhold

Performance and reliability of PZT-based piezoelectric micromirrors operated in realistic environments

Performance and reliability of PZT-based piezoelectric micromirrors operated in realistic environments

Kategori
Poster
Språk
Engelsk
Forfatter(e)
Institusjon(er)
  • Norges teknisk-naturvitenskapelige universitet
  • SINTEF Digital / Microsystems and Nanotechnology
  • Ukjent
Presentert på
2018 ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP 2018) May 27 - June 1, 2018, Hiroshima
Sted
Hiroshima
Dato
27.05.2018 - 01.06.2018
Arrangør
IEEE
År
2018