- Enhet:
- SINTEF Digital
- Avdeling:
- Smarte sensorer og mikrosystemer
- Kontorsted:
- Oslo
Publikasjoner
- MEMS-tunable dielectric metasurface lens using thin-film PZT for large displacements at low voltages
- Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching
- Silicon Metalens Fabrication from Electron Beam to UV-Nanoimprint Lithography
- Dynamic piezoelectric MEMS-based optical metasurfaces
- Dynamic optical MEMS Metasurfaces
- Development of a high throughput metalens fabrication process relying on Bosch Deep Reac- tive Ion Etching and UV Nano Imprint Lithorgraphy
- Står foran en optisk revolusjon
- Towards high-throughput large-area metalens fabrication using UV-nanoimprint lithography and Bosch deep reactive ion etching
- Dynamical Behaviour of a piezoMEMS Micromirror During Degradation
- NIL Metasurfaces for miniaturized optics