900 37 638
- Unit:
- SINTEF Digital
- Department:
- Smart Sensors and Microsystems
- Office:
- Oslo
Expertise
Publications
- MEMS-tunable dielectric metasurface lens using thin-film PZT for large displacements at low voltages
- High-quality dense 3D point clouds with active stereo and a miniaturizable interferometric pattern projector
- Dynamic piezoelectric MEMS-based optical metasurfaces
- Dynamic optical MEMS Metasurfaces
- Development of a high throughput metalens fabrication process relying on Bosch Deep Reac- tive Ion Etching and UV Nano Imprint Lithorgraphy
- On the effect of water-induced degradation of thin-film piezoelectric microelectromechanical systems
- Compact interferometric projector for high accuracy 3D imaging in space
- Står foran en optisk revolusjon
- Towards high-throughput large-area metalens fabrication using UV-nanoimprint lithography and Bosch deep reactive ion etching
- Dynamical Behaviour of a piezoMEMS Micromirror During Degradation