Piezoelectric microelectromechanical systems (piezoMEMS) technology has found many applications within sensor and communication technology. A scientific challenge is the reliability of piezoMEMS operating at high electromechanical stresses in realistic environments, often associated with high humidi...

Lead Zirconate Titanate (Pb(Zrx,Ti1−x )O3) is, due to its high piezoresponse, widely used in piezoelectric Micro Electro Mechanical Systems (piezoMEMS) such as accelerometers, gyroscopes and actuators. However, since PZT is highly sensitive to humidity, devices tend to suffer severe degradation when...

Bimorphly actuated piezoelectric thin films offer an efficient low-power route for generating microelectromechanical motion compared to e.g. electrostatic or thermo-mechanical actuation principles [1]. This is since a large effective in-plane stress can be generated by applying relatively low voltag...

Infrared (IR) thermal emitters are widely used in monitoring applications. For autonomous systems, miniaturized devices with low power consumption are needed. We have designed, fabricated and tested a novel device design, packaged on the wafer level by Al-Al thermo-compression bonding. 80 μm wide Al...

A low-power infrared source based on a silicon photonic-crystal membrane has been designed. Temperature distribution and reflection spectrum has been simulated. Large narrowband IR absorption is obtained with optimal material doping....

A low-power infrared source based on a silicon photonic-crystal membrane has been designed. Temperature distribution and reflection spectrum has been simulated. Large narrowband IR absorption is obtained with optimal material doping...