Pressure is an essential parameter for the normal function of almost all organs in the human body. Measurement of pressure is therefore highly important in clinical practice and medical research. In clinical practice, pressures are often measured indirectly through a fluid line where the pressure is...

An in vivo sensor system for direct measurement of pressure in the human urinary bladder is developed. The core component in the system is a small-sized and highly sensitive piezoresistive MEMS pressure sensor element integrated in a sensor catheter. The sensor catheter is wired to an external modul...

Silicon direct wafer bonding is a process with many application areas. Depending on the application, perfect insulation or negligible resistance is desired across the bonded interface. We have investigated the resistivity of hydrophilic high-temperature silicon direct wafer bonds by measuring the re...

This paper presents a study on the feasibility of packaging a sensor element by a thin biocompatible coating. The goal of the work was twofold; Firstly to investigate the possible impact of the coating on sensor element performance; Secondly to examine the sensor element functionality after soaking ...