Publication
AR for production
- Year
- 2022
- Type
- Lecture
Variations in proton relative biological effectiveness (RBE) with dose averaged linear energy transfer (LET) remain one of the largest sources of uncertainty in proton radiotherapy. Biological robust LET based optimization has been introduced into some clinical treatment planning systems (TPS) to...
We report on the carrier lifetime control over 150 μmthick 4H-SiC epitaxial layers via thermal generation and annihilation of carbon vacancy (VC) related Z1/2lifetime killer sites. The defect developments upon typical SiC processing steps, such as high- and moderate-temperature anneals...