On the effect of water-induced degradation of thin-film piezoelectric microelectromechanical systems
Lifetime and reliability in realistic operating conditions are important parameters for the application of thin-film piezoelectric microelectromechanical systems (piezoMEMS) based on lead zirconate titanate (PZT). Humidity can induce time-dependent dielectric breakdown at a higher rate compared to...
- Authors
- Runar Dahl-Hansen
- Frode Tyholdt
- Jo Gjessing
- Andreas Vogl
- Paul Wittendorp
- Jon Vedum
- Per Thomas Martin Tybell
- Year
- 2021
- Type
- Academic article