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On the effect of water-induced degradation of thin-film piezoelectric microelectromechanical systems

On the effect of water-induced degradation of thin-film piezoelectric microelectromechanical systems

Category
Academic article
Language
English
Affiliation
  • Norwegian University of Science and Technology
  • SINTEF Digital / Microsystems and Nanotechnology
  • SINTEF Digital / Smart Sensor Systems
Year
Published in
Journal of microelectromechanical systems
ISSN
1057-7157
Volume
30
Issue
1
Page(s)
105 - 115