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On the effect of water-induced degradation of thin-film piezoelectric microelectromechanical systems

Category

Academic article

Language

English

Affiliation

  • Norwegian University of Science and Technology
  • SINTEF Industry / Sustainable Energy Technology
  • SINTEF Digital / Microsystems and Nanotechnology

Year

2021

Published in

Journal of microelectromechanical systems

ISSN

1057-7157

Volume

30

Issue

1

Page(s)

105 - 115

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