926 54 821
- Unit:
- SINTEF Digital
- Department:
- Smart Sensors and Microsystems
- Office:
- Oslo
Publications
- High-quality dense 3D point clouds with active stereo and a miniaturizable interferometric pattern projector
- Stress and microstructure in Si films by high-rate e-beam
- High-Rate Deposition of Epitaxial Silicon by E-beam Evaporation
- On the effect of water-induced degradation of thin-film piezoelectric microelectromechanical systems
- Stress considerations for sputtered lead-free (Ba,Ca)(Zr,Ti)O3 thin films
- Additive manufacturing of lead-free piezoelectric ceramics by stereolithography
- Multi-layer piezoelectric elements of lead-free BNT-6BT ceramics
- Electrochemically driven degradation of chemical solution deposited ferroelectric thin-films in humid ambient
- Lead-free piezoelectric thin-films on 6" wafers for applications
- Dynamical Behaviour of a piezoMEMS Micromirror During Degradation