Publication
Piezoelectric MEMS development in SINTEF
https://www.sintef.no/en/publications/publication/?pubid=CRIStin+1650518
SINTEF is an independent research institute that has experience with making piezoMEMS devices since 2002. Our competences cover the whole process from idea and design, through materials development and process integration to device fabrication to packaging. SINTEF develops piezoMEMS in-house and in ...