The number of application areas for piezoelectric micro electromechanical systems based on PZT have increased rapidly over the years. Thus, to continue the development towards commercial deployment, characterizing lifetime and reliability during operation in realistic and harsh environments is impor...

Lead Zirconate Titanate (Pb(Zrx,Ti1−x )O3) is, due to its high piezoresponse, widely used in piezoelectric Micro Electro Mechanical Systems (piezoMEMS) such as accelerometers, gyroscopes and actuators. However, since PZT is highly sensitive to humidity, devices tend to suffer severe degradation when...

Bimorphly actuated piezoelectric thin films offer an efficient low-power route for generating microelectromechanical motion compared to e.g. electrostatic or thermo-mechanical actuation principles [1]. This is since a large effective in-plane stress can be generated by applying relatively low voltag...

Highly planarized PbZr0.48Ti0.52O3(PZT)-based piezoelectric micropistons (PIMPs) were fabricated at SINTEF MiNaLab using chemical solution deposited (CSD) and pulsed laser deposited (PLD) PZT. Both CSD and PLD-based devices were actuated at 20V peak-to-peak sine wave with a frequency of 1.9kHz in hu...

SINTEF is an independent research institute that has experience with making piezoMEMS devices since 2002. Our competences cover the whole process from idea and design, through materials development and process integration to device fabrication to packaging. SINTEF develops piezoMEMS in-house and in ...