This paper focuses on deep reactive ion etching (DRIE) of sub-micrometer features. Very high aspect ratios up to 160:1 on trenches of 250 nm have been achieved using the Bosch process and up to 120:1 on trenches of 35 nm using a cryogenic process. The proposed etch recipes are specifically optimized...
The influence of microchemistry on the softening behaviour of two cold-rolled Al–Mn–Fe–Si alloys with different initial amounts of Mn (0.4 and 1.0 wt%) is studied. In addition to their as-cast conditions, the supersaturated Al–Mn–Fe-Si alloys were appropriately homogenized at two different...
Finding a pressure solution for large-scale reservoirs that takes into account fine-scale heterogeneities can be very computationally intensive. One way of reducing the workload is to employ multiscale methods that capture local geological variations using a set of reusable basis functions. One of...
Protective clothing for improved safety and performance in the fisheries Safe@Sea addresses the strategic objective to reduce the risk of injury in complex systems through advanced personal protective equipment. The main objective of Safe@Sea is to develop a new generation of advanced personal...
Fire målgruppers oppfatning av studiekvalitet i lærerutdanningene er kartlagt gjennom en stor survey våren 2013, og resultatene er sammenliknet med en tilsvbarende undersøkelse våren 2010. For målgruppene rektorer, praksislærere og lærerutdannere er det bare små utslag i oppfatningene i begge...
We present mirrors and anti-reflective (AR) surfaces based on micro-structuring of silicon. Compared to dielectric Bragg reflector mirrors and thin film AR-coatings these structures are thinner, result in less material stress, and are compatible with CMOS technology (all silicon). Our surface...