EPITAXIAL GROWTH OF SILICON BY ELECTRON BEAM EVAPORATION DEPOSITION

Author(s)

• Marit Synnøve Sæverud Stange
• Tor Olav Sunde
• Runar Dahl-Hansen
• Amin S. Azar
• Joachim Seland Graff
• J. Nørgaard
• Alexander G. Ulyashin

Affiliation

• SINTEF Industry / Sustainable Energy Technology
• Unknown
• SINTEF Industry / Metal Production and Processing

Issue

2018