High-Rate Epitaxial Growth of Silicon Using Electron Beam Evaporation at High Temperatures

Client

• Research Council of Norway (RCN) / 245744
• Research Council of Norway (RCN) / 257639

Author(s)

• Marit Synnøve Sæverud Stange
• Tor Olav Sunde
• Runar Dahl-Hansen
• Kalpna Rajput
• Joachim Seland Graff
• Branson Belle
• Alexander G. Ulyashin

Affiliation

• SINTEF Industry / Sustainable Energy Technology
• SINTEF Digital / Smart Sensors and Microsystems
• SINTEF Industry / Metal Production and Processing

Issue

12

DOI