Lead-free piezoelectric thin-films on 6" wafers for applications
Category
Academic lecture
Client
- Research Council of Norway (RCN) / 250184
Language
English
Author(s)
- Runar Dahl-Hansen
- Per Martin Rørvik
- Marit Synnøve Sæverud Stange
- Tor Olav Sunde
- Johan Henrik Ræder
Affiliation
- Norwegian University of Science and Technology
- SINTEF Industry / Sustainable Energy Technology
Presented at
IEEE IFCS-ISAF, 19-23 July 2020
Place
Virtual
Date
19.07.2020 - 23.07.2020
Organizer
IEEE