Metal films for MEMS pressure sensors: comparison of Al, Ti, Al-Ti alloy and Al/Ti film stacks
Category
Academic lecture
Client
- Research Council of Norway (RCN) / 247781
Language
English
Author(s)
- Elizaveta Vereshchagina
- Erik Poppe
- Kari Schjølberg-Henriksen
- Markus Wöhrmann
- Sigurd Moe
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- Norwegian University of Science and Technology
- University of Oslo
- Unknown
Presented at
7th Electronics System-Integration Technology Conference
Place
Dresden
Date
18.09.2018 - 21.09.2018
Organizer
IEEE Electronic Packaging Society