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Metal films for MEMS pressure sensors: comparison of Al, Ti, Al-Ti alloy and Al/Ti film stacks

Metal films for MEMS pressure sensors: comparison of Al, Ti, Al-Ti alloy and Al/Ti film stacks

Category
Conference lecture and academic presentation
Client
  • Norges forskningsråd / 247781
Language
English
Author(s)
Affiliation
  • SINTEF Digital / Microsystems and Nanotechnology
  • Norwegian University of Science and Technology
  • University of Oslo
Presented at
7th Electronics System-Integration Technology Conference
Place
Dresden
Date
17.09.2018 - 20.09.2018
Organizer
IEEE Electronic Packaging Society
Year
2018
External resources