To main content

FP7 piezoVolume - High Volume Piezoelectric Thin Film Production Process For Microsystems

FP7 piezoVolume - High Volume Piezoelectric Thin Film Production Process For Microsystems

Category
Conference lecture and academic presentation
Language
English
Author(s)
Affiliation
  • SINTEF Digital / Microsystems and Nanotechnology
Presented at
piezoMEMS 2011
Place
Lausanne
Date
05.09.2011 - 06.09.2011
Organizer
EPFL
Year
2011