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FP7 piezoVolume - High Volume Piezoelectric Thin Film Production Process For Microsystems

FP7 piezoVolume - High Volume Piezoelectric Thin Film Production Process For Microsystems

Category
Conference lecture and academic presentation
Language
English
Author(s)
  • Tyholdt Frode
  • Haavik Camilla
  • Mazzalai Andrea
  • Tiedke Stephan
  • Kessels Roland
  • Kratzer Martin
  • Kaden Dirk
  • Schröpfer Gerold
  • Cruau Aurelie
  • Muffler Pirmin
  • Herrmann Rainer
  • Muralt Paul
Affiliation
  • SINTEF Digital / Microsystems and Nanotechnology
  • SINTEF Industry / Sustainable Energy Technology
Presented at
piezoMEMS 2011
Place
Lausanne
Date
05.09.2011 - 06.09.2011
Organizer
EPFL
Year
2011