FP7 piezoVolume - High Volume Piezoelectric Thin Film Production Process For Microsystems
Category
Academic lecture
Language
English
Author(s)
- Frode Tyholdt
- Camilla Haavik
- Andrea Mazzalai
- Stephan Tiedke
- Roland Kessels
- Martin Kratzer
- Dirk Kaden
- Gerold Schröpfer
- Aurelie Cruau
- Pirmin Muffler
- Rainer Herrmann
- Paul Muralt
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- SINTEF Industry / Sustainable Energy Technology
- Unknown
Presented at
piezoMEMS 2011
Place
Lausanne
Date
06.09.2011 - 07.09.2011
Organizer
EPFL