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Nonlinear model predictive control of the Czochralski Process

Abstract

Commercially, the Czochralski process is the most commonly applied method for production of monocrystalline silicon for semiconductor and solar cell applications. The process has traditionally been controlled using nested single-loop controllers. Due to the complex and nonlinear nature of the Cz process, this paper considers model-based control of the process with application of nonlinear model predictive controllers.

Category

Academic article

Language

English

Author(s)

  • Parsa Rahmanpour
  • Steinar Sælid
  • Morten Hovd
  • Oddvar Grønning
  • Moez Jomâa

Affiliation

  • Norwegian University of Science and Technology
  • Prediktor
  • SINTEF Industry / Metal Production and Processing

Year

2016

Published in

IFAC-PapersOnLine

ISSN

2405-8963

Publisher

Elsevier

Volume

49

Issue

20

Page(s)

120 - 125

View this publication at Cristin